Analysis of propagation and resonance properties of longitudinal leaky surface acoustic wave on LiNbO 3 /SiC bonded structure

Abstract The propagation and resonance properties of longitudinal leaky surface acoustic waves (LLSAW) on a bonded structure comprising an X-cut LiNbO 3 (LN) thin plate and a 4H-SiC support substrate were theoretically investigated. Strong LLSAW responses with high Q factors were obtained at the LN thin-plate thickness h where the LLSAW phase velocity was slower than the bulk shear wave of 4H-SiC…